PROCEDURAL STANDARDS FOR CERTIFIED TESTING OF CLEANROOMS

2009–THIRD EDITION

TABLE OF CONTENTS

Foreword III
NEBB Cleanroom Committee IV
Table of Contents V

PART 1 – STANDARDS

SECTION 1 Definitions 1
SECTION 2 NEBB Program, Quality Control and Compliance

2.1 NEBB Programs 7
2.1.1 NEBB Disciplines 7
2.1.2 Certification of Firms 7
2.1.3 Certification of Professionals 7
2.1.4 Certification of Technicians 8
2.1.5 Recertification Requirements 8
2.2 Quality Assurance Program – Conformance Certification 8
2.2.1 Program Advantages 8
2.2.2 NEBB Quality Assurance Program Certificate 8
2.3 Quality Control and Compliance 8
2.3.1 Cleanroom Work Compliance 8
2.4 Certified CPT Professional Responsibilities 9
2.4.1 Execution of CPT Procedures 9
2.4.2 Technician Training 9
2.4.3 Cleanroom Procedures Training 9
2.4.4 Instrument Use and Maintenance 9
2.4.5 Coordination / Supervision 9
2.4.6 Project Communication 10
2.4.7 Field Work Completion 10
2.4.8 Compilation and Submission of Final Cleanroom Reports 10
2.4.9 Project Completion 10

SECTION 3 Responsibilities

3.1 Introduction 11
3.2 Owner/Buyer and Design and Construction Team Responsibilities 11
3.2.1 Owner/Buyer and Design Professional Responsibilities 11
3.2.2 Owner/Buyer and/or Construction Team Responsibilities 12
3.2.3 NEBB Certified CPT Firm Responsibilities 12

SECTION 4 Standards for Equipment, Instrumentation and Calibration

4.1 Minimum Instrumentation 15
4.2 Range and Accuracy Use 15
Table 4-1 NEBB Minimum Instrumentation Requirements 16
Table 4-2 NEBB Minimum (should) Instrumentation Requirements 18

SECTION 5 Standards for Reports and Forms

5.1 Reports 25
5.2 Required Forms 26
5.2.1 Report Title 26
5.2.2 Report Certification 26
5.2.3 Table of Contents 26
5.2.4 Standard Operating Procedures (SOP’s) References 27
5.2.5 Report Summary / Remarks 27
5.2.6 Instrument Calibration Certificates 27
5.2.7 Abbreviations 27
5.3 Airflow Velocity and Uniformity Test – Filter Face Airflow Velocity - Unidirectional 27
5.4 Airflow Velocity and Uniformity Test – Filter Face Airflow Velocity - Non-Unidirectional (Volume Method) 28
5.5 Airflow Velocity and Uniformity Test – Filter Face Airflow Velocity - Non-Unidirectional (Velocity Method) 28
5.6 Airflow Velocity and Uniformity Test – Average Room Airflow Velocity 29
5.7 Airflow Volume and Uniformity Test – Flowhood Method 29
5.8 Airflow Volume and Uniformity Test – Traverse Method 30
5.9 Filter Installation Leak Tests – Aerosol Photometer Test Method 30
5.10 Filter Installation Leak Tests – Discrete Particle Counter Test Method 31
5.11 Filter Installation Leak Tests – Total Aerosol Penetration Test Method 32
5.12 Airborne Particle Count Cleanliness Classification Tests –ISO Standard 32
5.13 Airborne Particle Counting Tests – Sequential Sampling 33
5.14 Room Pressurization Tests 33
5.15 Airflow Parallelism Tests 33
5.16 Recovery Tests 34
5.17 Lighting Level and Uniformity Tests 34
5.18 Sound Level Tests 35
5.19 Vibration Level Tests 35
5.20 General Temperature and Humidity Uniformity Tests 35
5.21 Comprehensive Temperature and Humidity Uniformity Tests 36
5.22 Electrostatic Tests 36
5.23 Conductivity Tests 37
5.24 Electromagnetic Interference (EMI) Tests 37
5.25 Air Change Rate (ACH) Test 37
5.26 Bench Scan Filter Leak Tests 38

PART 2 - PROCEDURES

SECTION 6 Cleanroom Standard Operating Procedures

SECTION 7 Cleanroom Safety

SECTION 8 Cleanroom Protocol

SECTION 9 Cleanroom Tests

SECTION 10 Primary Tests

SECTION 11 Secondary Tests

APPENDICES

APPENDIX A Sample CPT Specifications I
APPENDIX A-1 Sample CPT Specification – Microelectronics & Semi-Conductors (Sample Specifications are available on the NEBB website) III
APPENDIX A-2 Sample CPT Specification – Bio-Medical & Pharmaceutical (Sample Specifications are available on the NEBB website) V
APPENDIX B References and Referenced Publications VII
APPENDIX C Engineering Formulas, Equivalents, & Examples XV

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